{"id":33473,"date":"2026-01-30T14:10:51","date_gmt":"2026-01-30T13:10:51","guid":{"rendered":"https:\/\/webex4.ims-chips.de\/ims_chips\/start-project\/microelectromechanical-systems\/"},"modified":"2026-11-09T08:48:32","modified_gmt":"2026-11-09T07:48:32","slug":"microelectromechanical-systems","status":"publish","type":"page","link":"https:\/\/ims-chips.de\/en\/start-project\/microelectromechanical-systems\/","title":{"rendered":"Microelectromechanical Systems"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-page\" data-elementor-id=\"33473\" class=\"elementor elementor-33473 elementor-15730\" data-elementor-post-type=\"page\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-9379a3c elementor-section-stretched elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"9379a3c\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-56e5093\" data-id=\"56e5093\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-601a3db elementor-widget elementor-widget-heading\" data-id=\"601a3db\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t\t<h1 class=\"elementor-heading-title elementor-size-default\">MEMS. For precision micromechanics and membranes in scalable applications. <\/h1>\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-406d80b elementor-section-stretched elementor-section-full_width elementor-section-height-min-height elementor-section-height-default elementor-section-items-middle\" data-id=\"406d80b\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-f704fff\" data-id=\"f704fff\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-af168c2 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"af168c2\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-09dc0a9\" data-id=\"09dc0a9\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-654492e elementor-widget elementor-widget-text-editor\" data-id=\"654492e\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>IMS CHIPS develops and fabricates microelectromechanical systems (MEMS) and large-area membranes &gt;exceeding 100 cm\u00b2 for advanced research and industrial applications. Our silicon wet and dry etching capabilities enable complex micromechanical structures with feature sizes down to 50 nm and aspect ratios of up to 1:50. Multilevel patterning with overlay accuracy of \u00b125 nm and through-wafer etching provide additional flexibility for demanding MEMS designs.<br\/>Our capabilities also include post-processing of CMOS foundry wafers, from selective thinning and membrane formation to layer deposition and patterning. This combination of high-precision silicon micromachining and CMOS post-processing supports the development of integrated MEMS solutions from initial concept through scalable implementation.  <\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-360c523 elementor-widget elementor-widget-aiero_button\" data-id=\"360c523\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"aiero_button.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\n        <div class=\"button-widget aiero-button-type-alt\">\n            <div class=\"button-container\">\n                                                    \t\t<a class=\"aiero-button\" href=\"https:\/\/ims-chips.de\/en\/contact-form\/\">Discuss your MEMS project now                    \t\t<span class=\"icon-button-arrow left\"><\/span><span class=\"icon-button-arrow right\"><\/span>\n                    \t<\/a>\n                \t                            <\/div>\n        <\/div>\n        \t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-5d8eed6\" data-id=\"5d8eed6\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-d3659c2 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"d3659c2\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-dccc9d7\" data-id=\"dccc9d7\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-1a5bd8b elementor-widget elementor-widget-heading\" data-id=\"1a5bd8b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">From the MEMS concept. To the validated prototype.<\/h2>\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-e52f8f0 elementor-section-stretched elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"e52f8f0\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-67ada14\" data-id=\"67ada14\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-01dbcc5 ims-gf-contact-align-center elementor-widget elementor-widget-ims_geschaeftsfelder_grid\" data-id=\"01dbcc5\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"ims_geschaeftsfelder_grid.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"ims-gf-grid\"><section class=\"ims-gf-card ims-gf-contact\"><div class=\"ims-gf-contact-left\"><h3 class=\"ims-gf-title\">Get started now.<\/h3><div class=\"ims-gf-people\"><div class=\"ims-gf-person\"><img decoding=\"async\" src=\"https:\/\/ims-chips.de\/wp-content\/uploads\/2026\/05\/letzkus.jpg\" alt=\"Dr. Florian Letzkus\" loading=\"lazy\"><div class=\"ims-gf-person-details\"><div class=\"ims-gf-person-name\">Dr. Florian Letzkus<\/div><div><a href=\"tel:+4971121855451\">+49 711 21855 - 451<\/a><\/div><div><a href=\"mailto:letzkus@ims-chips.de\">E-Mail<\/a><\/div><\/div><\/div><\/div><\/div><div class=\"ims-gf-contact-text\"><p>\u201cEvery MEMS project starts with understanding what the application needs to achieve. Together, we define the required functionality, materials, dimensions, geometry, and level of integration. From there, we develop the appropriate process flow, evaluate feasibility, fabricate prototypes, and refine the design toward a robust, scalable solution. If you have a MEMS challenge in mind, I\u2019d be happy to discuss it with you.\u201d   <\/p><\/div><\/section><article class=\"ims-gf-card ims-gf-business\"><div class=\"ims-gf-business-image\"><img decoding=\"async\" src=\"https:\/\/ims-chips.de\/wp-content\/uploads\/2026\/08\/Membranen.jpg\" alt=\"Membranes. Individually-designed for your application. \" loading=\"lazy\"><\/div><div class=\"ims-gf-business-body\"><h3 class=\"ims-gf-title\">Membranes. Individually-designed for your application. <\/h3><div class=\"ims-gf-content\"><p>We fabricate membranes in a range of geometries, dimensions, and materials to match the requirements of the application. Structures can be patterned directly into the membrane to create stencil masks or, for Si\u2083N\u2084 membranes, into thin chromium absorber layers to produce absorber masks. The result is a membrane solution engineered for applications in optics, sensing, and energy systems.  <\/p><\/div><\/div><\/article><article class=\"ims-gf-card ims-gf-business\"><div class=\"ims-gf-business-image\"><img decoding=\"async\" src=\"https:\/\/ims-chips.de\/wp-content\/uploads\/2026\/08\/Mikromechanik.jpg\" alt=\"Micromechanics. For complex silicon structures with feature sizes up to 50 nm. \" loading=\"lazy\"><\/div><div class=\"ims-gf-business-body\"><h3 class=\"ims-gf-title\">Micromechanics. For complex silicon structures with feature sizes up to 50 nm. <\/h3><div class=\"ims-gf-content\"><p>THE IMS CHIPS SOI wafer process and the two in-house variable-shaped electron-beam writers enable silicon structures with feature sizes down to 50 nm in membranes only a few hundred nanometers thick. For larger-scale structures, our in-house stepper, laser, and contact lithography capabilities provide a cost-effective alternative, including structures etched through the entire wafer substrate.<br \/>This combination gives developers access to fabrication technologies spanning nanoscale features and macroscopic silicon structures within a single technology portfolio.<\/p><\/div><\/div><\/article><article class=\"ims-gf-card ims-gf-business\"><div class=\"ims-gf-business-image\"><img decoding=\"async\" src=\"https:\/\/ims-chips.de\/wp-content\/uploads\/2026\/08\/CMOS.jpg\" alt=\"CMOS post-processing. MEMS integration directly onto finished CMOS chips. \" loading=\"lazy\"><\/div><div class=\"ims-gf-business-body\"><h3 class=\"ims-gf-title\">CMOS post-processing. MEMS integration directly onto finished CMOS chips. <\/h3><div class=\"ims-gf-content\"><p>Fully processed CMOS wafers can be further modified at IMS CHIPS through deep silicon etching, selective thinning, layer deposition, and additional patterning. These processes are available for both foundry wafers and substrates processed in-house.<br \/>Precise alignment enables CMOS circuitry and micromechanical components to be integrated and electrically interconnected. Our assembly, adhesive bonding, and chip-bonding capabilities also make it possible to combine multiple active and passive dies into complex chip stacks with sub-micrometer alignment accuracy. This provides a flexible route to highly integrated microsystems for a broad range of applications.   <\/p><\/div><\/div><\/article><\/div>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-a56f33a elementor-section-stretched elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"a56f33a\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t\t<div class=\"elementor-background-overlay\"><\/div>\n\t\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-wide\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-05b8c82\" data-id=\"05b8c82\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-076f400 elementor-widget elementor-widget-image\" data-id=\"076f400\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"1024\" height=\"683\" src=\"https:\/\/ims-chips.de\/wp-content\/uploads\/2026\/08\/Referenzen-1024x683.jpg\" class=\"attachment-large size-large wp-image-33485\" alt=\"A square, dark plate with a round, light blue microstructure in the center rests between two fingers.\" srcset=\"https:\/\/ims-chips.de\/wp-content\/uploads\/2026\/08\/Referenzen-1024x683.jpg 1024w, https:\/\/ims-chips.de\/wp-content\/uploads\/2026\/08\/Referenzen-300x200.jpg 300w, https:\/\/ims-chips.de\/wp-content\/uploads\/2026\/08\/Referenzen-768x512.jpg 768w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-abe4c9c\" data-id=\"abe4c9c\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-3246b9e elementor-widget elementor-widget-text-editor\" data-id=\"3246b9e\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<h4>References. For proven MEMS performance in demanding systems. <\/h4><p>IMS CHIPS MEMS and membrane technologies have been implemented across a range of advanced applications. Examples include optoelectronic microsystems for beam deflection in electron-beam writers and scanning electron microscopes, silicon photonics, and membrane-based energy systems such as direct methanol fuel cells (DMFCs).<br\/>Our technologies are also used to fabricate stencil masks for beam shaping, polarization filters, coating processes, and specialized micromechanical components.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>MEMS. For precision micromechanics and membranes in scalable applications. IMS CHIPS develops and fabricates microelectromechanical systems (MEMS) and large-area membranes &gt;exceeding 100 cm\u00b2 for advanced research and industrial applications. Our silicon wet and dry etching capabilities enable complex micromechanical structures with&#8230;<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":33521,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-33473","page","type-page","status-publish","hentry"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v28.8 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>MEMS Development &amp; Micromechanics | IMS CHIPS<\/title>\n<meta name=\"description\" content=\"IMS CHIPS develops precision MEMS and silicon membranes\u2014from microstructuring and CMOS integration to validated prototypes.\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/ims-chips.de\/en\/start-project\/microelectromechanical-systems\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"MEMS Development &amp; Micromechanics | IMS CHIPS\" \/>\n<meta property=\"og:description\" content=\"IMS CHIPS develops precision MEMS and silicon membranes\u2014from microstructuring and CMOS integration to validated prototypes.\" \/>\n<meta property=\"og:url\" content=\"https:\/\/ims-chips.de\/en\/start-project\/microelectromechanical-systems\/\" \/>\n<meta property=\"og:site_name\" content=\"IMS CHIPS - 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